Gas Cabinets
Precision Flow Technologies’ NANOPURGE™ UHP gas cabinets were developed to meet the needs of all users from the “small labs” to the “world’s largest FAB’s.” Inherent in the design are reliability and serviceability features to insure uptime needed in today’s competitive environments. The NANOPURGE™ line of gas delivery products also strikes a balance between capability and cost by utilizing the latest technologies in controls systems. All fabrication is performed in our Class 100 clean room using state of the art orbital welding equipment and ASME section IX certified welders.
Our design team worked diligently developing the NANOPURGE™ line of gas cabinets to be user friendly as well as user safe. As with all Precision Flow process gas delivery equipment, the NANOPURGE™ gas cabinets have undergone full third party certification, including tracer gas analysis to meet, or exceed SEMI S2 standards and codes.
Precision Flow Technologies’ NANOPURGE™ gas cabinets are available in several configurations and designed to accommodate a wide variety of hazardous and liquefied gases.
Features and Benefits
- Fully Semi S2 code compliant and 3rd party certified
- F-15 tracer gas tested
- User control by means of a 10.5 color touch screen (HMI)
- Active alarm screens with time stamp and archived history
- On-Board exhaust monitoring
- Three levels of password protection
- User initiated cylinder change-out and maintenance routines
- Pressure, vacuum and weight levels displayed on touch screen
- Compact design to reduce overall foot print
- Wax head fire sprinkler
- All UHP wetted flow paths designed with specific gas compatible components
- Internally regulated pneumatic supply and vacuum drive circuits
- “Fast flo” 6” low internal volume UHP gas panel design
- Custom bent cylinder pigtails with either DISS or CGA cylinder connections
- Valved leak check and weld ports
- “Palm” actuated emergency safety stop button
- Entire completed plumbing assembly helium leak tested to 1x10-9
- Manufactured in our class 100 clean room and welded by our section 9 certified orbital welding team
